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2005 | ||
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1 | EE | Toshiro Kubota, Parag Talekar, Xianyun Ma, Tangali S. Sudarshan: A nondestructive automated defect detection system for silicon carbide wafers. Mach. Vis. Appl. 16(3): 170-176 (2005) |
1 | Toshiro Kubota | [1] |
2 | Xianyun Ma | [1] |
3 | Tangali S. Sudarshan | [1] |