| |
| 1993 | ||
|---|---|---|
| 2 | EE | Meinhard Paffrath, Karl Steger: Method of temporary coordinate domains for moving boundary value problems [semiconductor processing simulation]. IEEE Trans. on CAD of Integrated Circuits and Systems 12(6): 746-756 (1993) |
| 1990 | ||
| 1 | R. Bulirsch, Albert Gilg, Knut Merten, Karl Steger: Numerische Simulation in der Halbleiterindustrie. Inform., Forsch. Entwickl. 5(1): 42-56 (1990) | |
| 1 | R. Bulirsch | [1] |
| 2 | Albert Gilg | [1] |
| 3 | Knut Merten | [1] |
| 4 | Meinhard Paffrath | [2] |