| |
| 2002 | ||
|---|---|---|
| 1 | EE | Robert Wright II, Marlin Shopbell, Kristin Rust, Silpa Sigireddy: Wafer fabrication: effects of metrology load port buffering in automated 300mm factories. Winter Simulation Conference 2002: 1359-1364 |
| 1 | Kristin Rust | [1] |
| 2 | Silpa Sigireddy | [1] |
| 3 | Robert Wright II | [1] |