| |
| 2006 | ||
|---|---|---|
| 1 | EE | Kyung-Han Ryu, Song-Jae Lee, Jaehyun Park, Dong-Chul Park, Sang Hong: Fault Detection of Reactive Ion Etching Using Time Series Neural Networks. ISNN (2) 2006: 376-381 |
| 1 | Sang Hong | [1] |
| 2 | Song-Jae Lee | [1] |
| 3 | Dong-Chul Park | [1] |
| 4 | Jaehyun Park | [1] |