| |
| 2006 | ||
|---|---|---|
| 1 | EE | Xiaodong Wang, Baoqing Li, Onofrio L. Russo, Harry T. Roman, Ken K. Chin, Kenneth R. Farmer: Diaphragm design guidelines and an optical pressure sensor based on MEMS technique. Microelectronics Journal 37(1): 50-56 (2006) |
| 1 | Ken K. Chin | [1] |
| 2 | Kenneth R. Farmer | [1] |
| 3 | Baoqing Li | [1] |
| 4 | Harry T. Roman | [1] |
| 5 | Xiaodong Wang | [1] |