2006 | ||
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1 | EE | M. Madani, H. Colder, X. Portier, K. Zellama, R. Rizk, H. Bouchriha: Influence of hydrogen dilution and substrate temperature on growth of nanocrystalline hydrogenated silicon carbide films deposited by RF sputtering. Microelectronics Journal 37(10): 1031-1035 (2006) |
1 | H. Bouchriha | [1] |
2 | H. Colder | [1] |
3 | M. Madani | [1] |
4 | X. Portier | [1] |
5 | K. Zellama | [1] |