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2007 | ||
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2 | Beibei Ma, Seán F. McLoone, John Ringwood: Tracking plasma etch process variations using principal component analysis of oes data. ICINCO-SPSMC 2007: 361-364 | |
1991 | ||
1 | John Hickey, John Ringwood: An Integrated Environment for Computer-Aided Control Engineering. EUROCAST 1991: 668-687 |
1 | John Hickey | [1] |
2 | Beibei Ma | [2] |
3 | Seán F. McLoone | [2] |