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2007 | ||
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1 | EE | A. Bennis, C. Leinenbach, C. Raudzis, Roland Müller-Fiedler, S. Kronmüller: Measurement Technique for Elastic and Mechanical Properties of Polycrystalline Silicon-Germanium Films Using Surface Acoustic Waves and Projection Masks CoRR abs/0711.3305: (2007) |
1 | A. Bennis | [1] |
2 | S. Kronmüller | [1] |
3 | C. Leinenbach | [1] |
4 | Roland Müller-Fiedler | [1] |