Ioannis Raptis
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1996
1
EE
Nikos Glezos
, Ioannis Raptis: A fast electron beam lithography simulator based on the Boltzmann transport equation.
IEEE Trans. on CAD of Integrated Circuits and Systems 15
(1): 92-102 (1996)
Coauthor
Index
1
Nikos Glezos
[
1
]
Copyright ©
Sun May 17 03:24:02 2009 by
Michael Ley
(
ley@uni-trier.de
)
