1994 | ||
---|---|---|
2 | EE | Neal G. Pierce, Richard Stafford: Modeling and simulation of material handling for semiconductor wafer fabrication. Winter Simulation Conference 1994: 900-906 |
1992 | ||
1 | EE | Neal G. Pierce, Michael J. Drevna: Development of Generic Simulation Models to Evaluate Wafer Fabrication Cluster Tools. Winter Simulation Conference 1992: 874-878 |
1 | Michael J. Drevna | [1] |
2 | Richard Stafford | [2] |