2007 | ||
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1 | EE | Mitsuteru Kimura, Fumitoshi Sakurai, Hirao Ohta, Tomoyuki Terada: Proposal of a new structural thermal vacuum sensor with diode-thermistors combined with a micro-air-bridge heater. Microelectronics Journal 38(2): 171-176 (2007) |
1 | Mitsuteru Kimura | [1] |
2 | Fumitoshi Sakurai | [1] |
3 | Tomoyuki Terada | [1] |