James F. Nichols
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2008
1
EE
James F. Nichols,
Meghan Shilling
,
Thomas R. Kurfess
: Review of MEMS metrology solutions.
IJMTM 13
(2/3/4): 344-359 (2008)
Coauthor
Index
1
Thomas R. Kurfess
[
1
]
2
Meghan Shilling
[
1
]
Copyright ©
Sun May 17 03:24:02 2009 by
Michael Ley
(
ley@uni-trier.de
)
