| |
| 2000 | ||
|---|---|---|
| 1 | EE | Jeffrey W. Herrmann, Brian F. Conaghan, Laurent Henn-Lecordier, Praveen Mellacheruvu, Manh-Quan Nguyen, Gary W. Rubloff, Rock Z. Shi: Understanding the impact of equipment and process changes with a heterogeneous semiconductor manufacturing simulation environment. Winter Simulation Conference 2000: 1491-1498 |
| 1 | Brian F. Conaghan | [1] |
| 2 | Laurent Henn-Lecordier | [1] |
| 3 | Jeffrey W. Herrmann | [1] |
| 4 | Praveen Mellacheruvu | [1] |
| 5 | Gary W. Rubloff | [1] |
| 6 | Rock Z. Shi | [1] |