B. Ramana Murthy

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2004

1 EE B. Ramana Murthy, Rakesh Kumar: A method for deep etching in dielectric films for 3D-chip and photonics applications. Microelectronics Journal 35(11): 909-913 (2004)

2004
1	EE	B. Ramana Murthy, Rakesh Kumar: A method for deep etching in dielectric films for 3D-chip and photonics applications. Microelectronics Journal 35(11): 909-913 (2004)

Coauthor Index

1 Rakesh Kumar [1]