| |
| 2005 | ||
|---|---|---|
| 1 | EE | N. Wilke, A. Mulcahy, S.-R. Ye, A. Morrissey: Process optimization and characterization of silicon microneedles fabricated by wet etch technology. Microelectronics Journal 36(7): 650-656 (2005) |
| 1 | A. Morrissey | [1] |
| 2 | N. Wilke | [1] |
| 3 | S.-R. Ye | [1] |