2005 | ||
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1 | EE | K. Isamoto, T. Makino, A. Moroswa, C. Chong, H. Fujita, H. Toshiyoshi: Self-assembly technique for MEMS vertical comb electrostatic actuator. IEICE Electronic Express 2(9): 311-315 (2005) |
1 | C. Chong | [1] |
2 | H. Fujita | [1] |
3 | K. Isamoto | [1] |
4 | T. Makino | [1] |
5 | H. Toshiyoshi | [1] |