M. Maroufi
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2008
1
EE
M. Shamshirsaz
, M. Maroufi,
M. B. Asgari
: Geometrical Variation Analysis of an Electrothermally Driven Polysilicon Microactuator
CoRR abs/0805.0888
: (2008)
Coauthor
Index
1
M. B. Asgari
[
1
]
2
M. Shamshirsaz
[
1
]
Copyright ©
Sun May 17 03:24:02 2009 by
Michael Ley
(
ley@uni-trier.de
)