Chantal Khan Malek
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2004
1
EE
Chantal Khan Malek,
Volker Saile
: Applications of LIGA technology to precision manufacturing of high-aspect-ratio micro-components and -systems: a review.
Microelectronics Journal 35
(2): 131-143 (2004)
Coauthor
Index
1
Volker Saile
[
1
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Copyright ©
Sun May 17 03:24:02 2009 by
Michael Ley
(
ley@uni-trier.de
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