T. Makabe
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2007
1
EE
T. Makabe,
T. Shimada
,
T. Yagisawa
: Plasma etching and feature evolution of organic low-k material by using VicAddress.
Computer Physics Communications 177
(1-2): 64-67 (2007)
Coauthor
Index
1
T. Shimada
[
1
]
2
T. Yagisawa
[
1
]
Copyright ©
Sun May 17 03:24:02 2009 by
Michael Ley
(
ley@uni-trier.de
)
