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| 1996 | ||
|---|---|---|
| 1 | EE | Edward A. Rietman, Suresh H. Patel, Earl R. Lory: Modeling and control of a semiconductor manufacturing process with an automata network: An example in plasma etch processing. Computers & OR 23(6): 573-585 (1996) |
| 1 | Suresh H. Patel | [1] |
| 2 | Edward A. Rietman | [1] |