2004 | ||
---|---|---|
1 | EE | B. Díaz, J. A. Rodríguez, M. Riera, A. Llobera, C. Domínguez, Joaquín Tutor-Sánchez: Optical properties of silicon rich silicon oxides obtained by PECVD. Microelectronics Journal 35(1): 65-67 (2004) |
1 | B. Díaz | [1] |
2 | C. Domínguez | [1] |
3 | M. Riera | [1] |
4 | J. A. Rodríguez | [1] |
5 | Joaquín Tutor-Sánchez | [1] |