![]() | ![]() |
2004 | ||
---|---|---|
1 | Lingli Liu, Osama Mukdadi, Hyoung Bum Kim, Jean R. Hertzberg, Robin Shandas, Victor Bright: Atomic Layer Deposition for Fabricating Capacitive Micromachined Ultrasonic Transducers: Initial Characterization. ISBI 2004: 512-515 |
1 | Victor Bright | [1] |
2 | Jean R. Hertzberg | [1] |
3 | Hyoung Bum Kim | [1] |
4 | Osama Mukdadi | [1] |
5 | Robin Shandas | [1] |