Kan-Yuang Liu
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2007
1
EE
Wen-Chin Chen
,
Amy H. I. Lee
,
Wei-Jaw Deng
, Kan-Yuang Liu: The implementation of neural network for semiconductor PECVD process.
Expert Syst. Appl. 32
(4): 1148-1153 (2007)
Coauthor
Index
1
Wen-Chin Chen
[
1
]
2
Wei-Jaw Deng
[
1
]
3
Amy H. I. Lee
[
1
]
Copyright ©
Sun May 17 03:24:02 2009 by
Michael Ley
(
ley@uni-trier.de
)
