Mingjun Li
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2008
1
EE
Hao Zhang
,
Yuanqiang Tan
, Mingjun Li: A Numerical Simulation of Motion of Particles under the Wafer in CMP.
CSSE (3) 2008
: 31-34
Coauthor
Index
1
Yuanqiang Tan
[
1
]
2
Hao Zhang
[
1
]
Copyright ©
Sun May 17 03:24:02 2009 by
Michael Ley
(
ley@uni-trier.de
)
