![]() | ![]() |
2005 | ||
---|---|---|
1 | EE | José A. Ramírez-Hernández, Heshan Li, Emmanuel Fernandez, Charles McLean, Swee Leong: A framework for standard modular simulation in semiconductor wafer fabrication systems. Winter Simulation Conference 2005: 2162-2171 |
1 | Emmanuel Fernandez | [1] |
2 | Swee Leong | [1] |
3 | Charles McLean | [1] |
4 | José A. Ramírez-Hernández | [1] |