| |
| 2006 | ||
|---|---|---|
| 3 | EE | Yang-Kuao Kuo, Chuen-Guang Chao: Control ability of spin coating planarization of resist filmand optimal control of developers. Microelectronics Journal 37(8): 759-764 (2006) |
| 2005 | ||
| 2 | EE | Yang-Kuao Kuo, Chuen-Guang Chao: Analysis of the effects of reflectance and refraction generated by wafers made from fused silica, ALOxNy and TiSixNy under different light sources on pattern length and best focus. Microelectronics Journal 36(1): 35-39 (2005) |
| 2004 | ||
| 1 | EE | Yang-Kuao Kuo, Chuen-Guang Chao, Chi-Yuan Lin: Analysis of instability line width and white wall created by the photolithography process. Microelectronics Journal 35(11): 915-922 (2004) |
| 1 | Chuen-Guang Chao | [1] [2] [3] |
| 2 | Chi-Yuan Lin | [1] |