| |
| 2000 | ||
|---|---|---|
| 1 | EE | Hidetoshi Kotera, Taku Hirasawa, Sasatoshi Senga, Susumu Shima: A Study on the Effect of Air on the Dynamic Motion of a MEMS Device and Its Shape Optimization. ISHPC 2000: 573-584 |
| 1 | Taku Hirasawa | [1] |
| 2 | Sasatoshi Senga | [1] |
| 3 | Susumu Shima | [1] |