| |
| 1999 | ||
|---|---|---|
| 1 | EE | Eric J. Koehler, Timbur M. Wulf, Alvin C. Bruska, Marvin S. Seppanen: Evaluation of cluster tool throughput for thin film head production. Winter Simulation Conference 1999: 714-719 |
| 1 | Alvin C. Bruska | [1] |
| 2 | Marvin S. Seppanen | [1] |
| 3 | Timbur M. Wulf | [1] |