Tomokazu Kawabata
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1971
1
Itaru Aramaki
, Tomokazu Kawabata,
Kazuhiko Arimoto
: Automation of Etching-Pattern Layout.
Commun. ACM 14
(11): 720-730 (1971)
Coauthor
Index
1
Itaru Aramaki
[
1
]
2
Kazuhiko Arimoto
[
1
]
Copyright ©
Sun May 17 03:24:02 2009 by
Michael Ley
(
ley@uni-trier.de
)
