Jonghyuk Kang
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2007
1
EE
Jonghyuk Kang,
Ganyoung Park
,
Jaekoo Lee
: Particle-in-Cell/Monte Carlo simulation of CF
4
discharge in capacitively coupled plasma reactor.
Computer Physics Communications 177
(1-2): 129-130 (2007)
Coauthor
Index
1
Jaekoo Lee
[
1
]
2
Ganyoung Park
[
1
]
Copyright ©
Sun May 17 03:24:02 2009 by
Michael Ley
(
ley@uni-trier.de
)
