| |
| 2007 | ||
|---|---|---|
| 1 | EE | Xiang-meng Jing, Di Chen, Dong-ming Fang, Chuang Huang, Jing-Quan Liu, Xiang Chen: Multi-layer microstructure fabrication by combining bulk silicon micromachining and UV-LIGA technology. Microelectronics Journal 38(1): 120-124 (2007) |
| 1 | Di Chen | [1] |
| 2 | Xiang Chen | [1] |
| 3 | Dong-ming Fang | [1] |
| 4 | Chuang Huang | [1] |
| 5 | Jing-Quan Liu | [1] |