![]() | ![]() |
2003 | ||
---|---|---|
1 | F. Robin, A. Orzati, E. Moreno, Otte Jakob Homan, W. Bachtold: Simulation and evolutionary optimization of electron-beam lithography with genetic and simplex-downhill algorithms. IEEE Trans. Evolutionary Computation 7(1): 69-82 (2003) |
1 | W. Bachtold | [1] |
2 | E. Moreno | [1] |
3 | A. Orzati | [1] |
4 | F. Robin | [1] |