| |
| 2005 | ||
|---|---|---|
| 1 | EE | Thomas L. Ritzdorf, Gregory J. Wilson, Paul R. McHugh, Daniel J. Woodruff, Kyle M. Hanson, Dakin Fulton: Design and modeling of equipment used in electrochemical processes for microelectronics. IBM Journal of Research and Development 49(1): 65-78 (2005) |
| 1 | Dakin Fulton | [1] |
| 2 | Paul R. McHugh | [1] |
| 3 | Thomas L. Ritzdorf | [1] |
| 4 | Gregory J. Wilson | [1] |
| 5 | Daniel J. Woodruff | [1] |