| |
| 1999 | ||
|---|---|---|
| 1 | EE | Edward K. Chan, Krishna Garikipati, Robert W. Dutton: Comprehensive Static Characterization of Vertical Electrostatically Actuated Polysilicon Beams. IEEE Design & Test of Computers 16(4): 58-65 (1999) |
| 1 | Edward K. Chan | [1] |
| 2 | Robert W. Dutton | [1] |