D. Fabrègue
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2007
1
EE
D. Fabrègue,
Nicolas André
,
T. Pardoen
,
J. P. Raskin
: New Internal Stress Driven on-Chip Micromachines for Extracting Mechanical Properties of Thin Films
CoRR abs/0711.3332
: (2007)
Coauthor
Index
1
Nicolas André
[
1
]
2
T. Pardoen
[
1
]
3
J. P. Raskin
[
1
]
Copyright ©
Sun May 17 03:24:02 2009 by
Michael Ley
(
ley@uni-trier.de
)
