| |
| 2004 | ||
|---|---|---|
| 1 | EE | Tim Fühner, Andreas Erdmann, Richárd Farkas, Bernd Tollkühn, Gabriella Kókai: Genetic Algorithms to Improve Mask and Illumination Geometries in Lithographic Imaging Systems. EvoWorkshops 2004: 208-218 |
| 1 | Richárd Farkas | [1] |
| 2 | Tim Fühner | [1] |
| 3 | Gabriella Kókai | [1] |
| 4 | Bernd Tollkühn | [1] |