2006 | ||
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1 | EE | B. Torbiéro, M. L. Pourciel-Gouzy, I. Humenyuk, J. B. Doucet, A. Martinez, Pierre Temple-Boyer: Mass patterning of polysiloxane layers using spin coating and photolithography techniques. Microelectronics Journal 37(2): 133-136 (2006) |
1 | I. Humenyuk | [1] |
2 | A. Martinez | [1] |
3 | M. L. Pourciel-Gouzy | [1] |
4 | Pierre Temple-Boyer | [1] |
5 | B. Torbiéro | [1] |