Cheng-Yung Chen

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2006

1 EE Yeou-Yih Lin, Ship-Peng Lo, Cheng-Yung Chen: Strain and stress analysis of the oxide film surface in the chemical mechanical polishing process. IJCAT 26(4): 233-241 (2006)

2006
1	EE	Yeou-Yih Lin, Ship-Peng Lo, Cheng-Yung Chen: Strain and stress analysis of the oxide film surface in the chemical mechanical polishing process. IJCAT 26(4): 233-241 (2006)

Coauthor Index

1 Yeou-Yih Lin [1]

2 Ship-Peng Lo [1]