| |
| 2005 | ||
|---|---|---|
| 1 | EE | Phillipe M. Vereecken, Robert A. Binstead, Hariklia Deligianni, Panayotis C. Andricacos: The chemistry of additives in damascene copper plating. IBM Journal of Research and Development 49(1): 3-18 (2005) |
| 1 | Panayotis C. Andricacos | [1] |
| 2 | Hariklia Deligianni | [1] |
| 3 | Phillipe M. Vereecken | [1] |