Giorgio Bacelli

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2007

1 Giorgio Bacelli, John V. Ringwood, Petar Iordanov: Impedance matching controller for an inductively coupled plasma chamber - L-type matching network automatic controller. ICINCO-SPSMC 2007: 202-207

2007
1		Giorgio Bacelli, John V. Ringwood, Petar Iordanov: Impedance matching controller for an inductively coupled plasma chamber - L-type matching network automatic controller. ICINCO-SPSMC 2007: 202-207

Coauthor Index

1 Petar Iordanov [1]

2 John V. Ringwood [1]