![]() | ![]() |
2008 | ||
---|---|---|
2 | EE | Udo Triltsch, Stephanus Büttgenbach: Next Generation of TCAD Environments for MEMS Design CoRR abs/0805.0926: (2008) |
2007 | ||
1 | EE | Stephanus Büttgenbach: Collaborative Research Center 516: Design and Manufacturing of Active Micro Systems (Sonderforschungsbereich 516: Konstruktion und Fertigung aktiver Mikrosysteme). it - Information Technology 49(3): 194- (2007) |
1 | Udo Triltsch | [2] |